Jetalon

CR-288®

Manufacturers in the semiconductor industry require accurate, real time, point-of-use fluid metrology for process monitoring and control. The CR-288® is the first compact device to provide in-line, real-time analysis of liquid chemical concentration for semiconductor manufacturing processes.

Based on refractive index principles, the high resolution, four-channel liquid chemical concentration monitoring system has a 1 second response time and resolution of better than 0.01% (by weight) over its entire dynamic range. The CR-288 features automatic temperature compensation and can report either index of refraction (IoR) or concentration. The complete system consists of a fully integrated, miniaturized optical sensor head, digital display unit (DDU) for stand-alone operation and 288-connect™ software for data acquisition and analysis, field calibration, diagnostics, alarm setup and many other user features.

When installed, the sensor head is process transparent, contains no moving parts, and is compatible with most chemicals found in semiconductor manufacturing processes including acids, bases, solvents, slurries, suspensions and caustics. The ultra-high purity wetted components eliminate any contamination concerns.

The DDU enables operation of up to four sensor heads for simultaneous monitoring of four unique chemicals. The DDU has an LCD display and analog outputs for both concentration or (IoR) and temperature. Digital outputs for alarms are user-configurable through Jetalon’s proprietary 288-connect&trade software.

Purchasing information:
For CR-288® Concentration Monitor pricing and availability, please contact Jetalon at 925-274-1288 or email info@jetalon.com.