These case studies demonstrate that Entegris – Jetalon's proprietary technologies and methods of monitoring by non-contact refractometry provide data that is accurate, detailed, and repeatable.
CR-288 All Purpose Liquid Chemical Concentration Monitor »
|Wafer Surface Preparation in Back-End-of-Line (pdf)||Wafer Surface Preparation in Front-End-of-Line (pdf)|
|CIGS - Chemical Blending in Solar Cell Manufacturing (pdf)||H2O2 - Hydrogen Peroxide Blending in CMP Slurries (pdf)|
|TMAH Blending and Recycling in Photolithography (pdf)||CR-288 vs Auto-Titration (pdf)|
NX-148 Stand-Alone Liquid Chemical Concentration Monitor »
Case Studies coming soon. Note: All of the case studies for CR-288 apply.
Entegris – Jetalon Solutions, Inc.
3343-B Vincent Road
Pleasant Hill, CA 94523
: (925) 274-1288
: (800) 878-2311
Product and Technical Support
Global Product Support Engineer