Jetalon

Dr. Robert Helms
Advisor

Bob Helms is one of the world's foremost experts in engineering research and education. Prior to joining UT-Dallas as Dean of Engineering and Computer Science, he was President and CEO of International SEMATECH. Previously, Helms was Corporate Vice President and Director of Silicon Technology Research at Texas Instruments (TI) in Dallas, Texas and was responsible for TI's advanced R&D in silicon process, equipment and materials technology. He also oversaw TI's partnerships with ISMT, suppliers and research institutes. Helms came to TI in 1997 as Director of the Components and Materials Research Center from Stanford University, where he was a professor in the electrical engineering department from 1976 to 2000. At Stanford, Helms also served as Director of Solid State Industrial Affiliates, one of the first consortia formed to promote education and research in solid state technology. He was named Professor Emeritus in 1999.

During his academic career, Helms led research efforts on semiconductor processing and new materials especially related to atomic level surface phenomena. His early work on the atomic nature of the Si/SiO2 interface led to a better fundamental understanding of that topic, which is one of the foundations of modern semiconductor process technology. Subsequent work focused on surface preparation, flexible manufacturing, and environmentally friendly semiconductor processing. Helms has published over 150 papers in top refereed journals in engineering and applied physics.

Helms is a founding associate director of the NSF/SRC (National Science Foundation/Semiconductor Research Corporation) Engineering Research Center for Environmentally Benign Semiconductor Manufacturing. The group, headquartered at the University of Arizona, Tucson, conducts research to promote "green" manufacturing of semiconductors.

Born in Wichita, Kansas in 1947, Helms earned his MS and PhD degrees in electrical engineering at Stanford University and received his undergraduate degree at the University of California at Berkeley.